| NUKLEONIKA 1999, 44(2):137-142
COLD HOLLOW CATHODE ION SOURCEK. Kiszczak Institute of Physics, Maria Curie-Sklodowska University, Pl. M. Curie-Sklodowskiej 1, 20-031 Lublin, Poland This paper presents a description of the construction and the basic exploitation characteristics of a glow ion source with a hollow cathode, adapted for colaboration with a laboratory implantator of ions. The aparatus generates ion beams of gas elements at up to 3 mA of a high purity, which allows for ion implantation without a magnetic analyser. Good stability and reliability of the operation and a simple construction of both the instrument itself and the supply systems make possible its installation in various technological conditions utilizing ion beams. Close X |