| NUKLEONIKA 1999, 44(2):155-160
THREE-DIMENSIONAL SURFACE IMAGING BY THE DIRECTIONAL SIGNAL DETECTIONW. Słówko Institute of Microsystem Technology, Wroclaw University of Technology, 11/17 Janiszewskiego Str., 50-372 Wroclaw, Poland A method for three dimensional reconstruction of the surface topography based on the "shape from signal distribution" rule is presented. It consists in directional detection of the secondary electron signal and its processing according to the formulas described. The topography can be displayed in a form of the surface profiles or fully three dimensionally in an axonometric view. Close X |