| NUKLEONIKA 1999, 44(2):161-166
ELECTRON OPTICAL PROPERTIES OF RETARDING LENSES
FOR THE LOW VOLTAGE SEM
W. Drzazga, W. Słówko
Institute of Microsystem Technology, Wroclaw University of Technology,
11/17 Janiszewskiego Str., 50-372 Wroclaw, Poland
There are possibilities for adaptation of the standard SEMs to obtain low energy electron micrographs. The authors propose to apply a multi-detector system where retarding electron lenses can be arranged in two sectors: above the system and below it. The parameters (including spherical and chromatic abberrations) for a row of configurations of the lenses were computed, and some of them were also examined experimentally.
Close X |