| NUKLEONIKA 2012, 57(2):287-290
METHANE CRACKING AND SECONDARY HYDROCARBON GENERATION
IN INDUCTIVELY COUPLED RF PLASMAS
Francisco L. Tabarés1, Daniel Alegre1, Miran Mozetič2, Alenka Vese2
1 Laboratorio Nacional de Fusion,
Centro de Investigaciones Energéticas,
Medioambientales y Tecnológicas (CIEMAT),
22 Avda Complutense, E-28404 Madrid, Spain
2 Department of Surface Engineering, Jožef Stefan Institute,
39 Jamova Str., SI-1000 Ljubljana, Slovenia
Pure methane plasmas have been produced in an inductively coupled radio frequency (ICRF) reactor with quartz walls in the absence of carbon film deposition. A differentially pumped mass spectrometer was used for the recording of the secondary hydrocarbon species produced in the reactor. The functional dependences of these species with plasma parameters has been analyzed and tentative mechanisms for their formation have been formulated. High power per molecule ratio promotes methane decomposition and acetylene formation.
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